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SEMI D32 : 2003(R2009)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION

Published date

12-01-2013

Describes the location, dimensions, and message size of the marking symbol that consists of a two-dimensional code symbol and related alpha numeric characters (capable of being read visually through the reader camera and display) and is located outside of the quality area of glass flat panel display (FPD) substrate.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2003) Also available in CD-ROM. (07/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D52 : 2008E SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID
SEMI D48 : NOV 2007 SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL

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