Name: SEMI D48 : NOV 2007
Brand: SEMI

SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (02/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI D49 : 2007	SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION
SEMI D52 : 2008E	SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID

SEMI D32 : 2003(R2009)	SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION
SEMI D24 : 2000(R2006)	SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D9 : 2003(R2015)	TERMINOLOGY FOR FPD SUBSTRATES
SEMI D44 : 2006E	SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL

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SEMI D48 : NOV 2007

SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL

Abstract

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Standards Referencing This Book

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