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SEMI
SEMI D52 : 2008E

SEMI D52 : 2008E

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the substrate ID positioning with 2D Code.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2008) E = This standard was editorially modified to correct an error. (12/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D32 : 2003(R2009) SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION
SEMI D48 : NOV 2007 SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES

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