SEMI M67 : 2015

Name: SEMI M67 : 2015
Brand: SEMI

Superseded

TEST METHOD FOR DETERMINING WAFER NEAR-EDGE GEOMETRY FROM A MEASURED THICKNESS DATA ARRAY USING THE ESFQR, ESFQD, AND ESBIR METRICS

Superseded date

05-10-2020

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Includes calculation of the near-edge geometry metrics ESFQR, ESFQD and ESBIR.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2006)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI M67:2020

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