SEMI M77 : 2015

Name: SEMI M77 : 2015
Brand: SEMI

Superseded

TEST METHOD FOR DETERMINING WAFER NEAR-EDGE GEOMETRY USING ROLL-OFF AMOUNT, ROA

Superseded date

07-06-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Includes calculation of the near-edge geometry metric roll-off amount (ROA).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (12/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI M77 : 2021

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