Name: SEMI M70 : 2015
Brand: SEMI

TEST METHOD FOR DETERMINING WAFER-NEAR-EDGE GEOMETRY USING PARTIAL WAFER SITE FLATNESS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies calculation of the near edge geometry metrics PSFQR and PSFQD.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI M70 : 2015