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ASTM E 1127 : 2008 : R2015

ASTM E 1127 : 2008 : R2015

Current

Current

The latest, up-to-date edition.

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-06-2015

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 03.06, 2015 Defines procedures used for depth profiling in Auger electron spectroscopy.

1.1This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2Guidelines are given for depth profiling by the following:

Section

Ion Sputtering 

6

Angle Lapping and Cross-Sectioning 

7

Mechanical Cratering 

8

Mesh Replica Method

9

Nondestructive Depth Profiling 

10

1.3The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Committee
E 42
DocumentType
Guide
Pages
5
ProductNote
Reconfirmed 2015
PublisherName
American Society for Testing and Materials
Status
Current

ASTM E 2735 : 2014 Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ASTM E 996 : 2019 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
ASTM E 1078 : 2014 Standard Guide for Specimen Preparation and Mounting in Surface Analysis

ASTM E 1577 : 2004 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
ASTM E 1636 : 2004 Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
ASTM E 1634 : 2011 : REDLINE Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 1829 : 2014 Standard Guide for Handling Specimens Prior to Surface Analysis
ASTM E 1577 : 2011 : REDLINE Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
ASTM E 1078 : 2002 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
ASTM E 1078 : 1997 Standard Guide for Procedures for Specimen Preparation and Mounting in Surface Analysis
ASTM E 1577 : 2011 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020)
ASTM E 673 : 2002 Standard Terminology Relating to Surface Analysis
ASTM E 1078 : 2014 : REDLINE Standard Guide for Specimen Preparation and Mounting in Surface Analysis
ASTM E 1636 : 2010 Standard Practice for Analytically Describing Depth-Profile and Linescan-Profile Data by an Extended Logistic Function (Withdrawn 2019)
ASTM E 1829 : 2002 Standard Guide for Handling Specimens Prior to Surface Analysis
ASTM E 1829 : 2009 Standard Guide for Handling Specimens Prior to Surface Analysis
ISO/TR 22335:2007 Surface chemical analysis Depth profiling Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer
ASTM E 1634 : 2002 : R2007 Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 1634 : 2011 : R2019 Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 673 : 2003 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
ASTM E 673 : 2002 : REV B Standard Terminology Relating to Surface Analysis
ASTM E 1829 : 2014 : REDLINE Standard Guide for Handling Specimens Prior to Surface Analysis
ASTM E 1078 : 2014 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
ASTM E 1577 : 1995 : R2000 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
ASTM E 1634 : 2011 Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 1634 : 1994 : R1999 Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 1636 : 1994 : R1999 Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
ASTM E 1634 : 2002 Standard Guide for Performing Sputter Crater Depth Measurements
ASTM E 1829 : 1997 Standard Guide for Handling Specimens Prior to Surface Analysis
ASTM E 1078 : 2009 Standard Guide for Specimen Preparation and Mounting in Surface Analysis
ASTM E 684 : 2004 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces (Withdrawn 2012)

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