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  • VDI 2083 Blatt 3:2005-07

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    Cleanroom technology - Metrology and test methods

    Available format(s):  Hardcopy, PDF

    Superseded date:  04-08-2022

    Language(s):  German - English

    Published date:  01-07-2005

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1 Scope and objective
    2 References to other technical rules
    3 Terms and definitions
    4 Test methods
    5 Measurement procedures
    6 Documentation
    7 Minimum requirements to be met by the
      test report
    Bibliography

    Abstract - (Show below) - (Hide below)

    The document applies to measuring methods and measuring devices in connection with acceptance measurements and the monitoring of clean room technical systems in operation.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Superseded
    Superseded By
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
    DIN 1946-4:2016-06 (Draft) VENTILATION AND AIR CONDITIONING - PART 4: VENTILATION IN BUILDINGS AND ROOMS OF HEALTH CARE
    VDI 2083 Blatt 3.1:2012-06 Cleanroom technology - Metrology in cleanroom air - Monitoring
    VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
    VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
    VDI 3803 Blatt 4:2012-09 Air-conditioning, system requirements - Air filter systems (VDI Ventilation Code of Practice)
    VDI 2083 Blatt 2:2015-04 Cleanroom technology - Stipulations regarding the checking and monitoring of continued compliance with specifications
    VDI 3491 Blatt 15:1996-12 Particulate matter measurement - Generation of test aerosols - Dilution systems with continuous volumetric flow
    VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
    VDI 2262 Blatt 4:2006-03 Workplace air - Reduction of exposure to air pollutants - Capture of air pollutants
    VDI 6300 Blatt 1:2016-05 Genetic engineering operations in genetic engineering facilities - Guidance on safe operation of genetic engineering facilities
    DIN 1946-4:2008-12 VENTILATION AND AIR CONDITIONING - PART 4: VAC SYSTEMS IN BUILDINGS AND ROOMS USED IN THE HEALTH CARE SECTOR
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    VDI 2083 Blatt 9.1:2006-12 Clean room technology - Compatibility with required cleanliness and surface cleanliness
    VDI/VDE 2627 Blatt 1:2015-12 Measuring rooms - Classification and characteristics - Planning and execution
    VDI 2083 Blatt 13.2:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications
    VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
    VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification
    VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms

    Standards Referencing This Book - (Show below) - (Hide below)

    EN ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)
    DIN EN 1822-4:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 4: DETERMINING LEAKAGE OF FILTER ELEMENTS (SCAN METHOD)
    DIN EN ISO 14644-1:2016-06 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015)
    EN ISO 14698-1 : 2003 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - BIOCONTAMINATION CONTROL - PART 1: GENERAL PRINCIPLES AND METHODS
    VDI 2083 Blatt 11:2008-01 Cleanroom technology - Quality assurance
    DIN EN 61672-1:2014-07 ELECTROACOUSTICS - SOUND LEVEL METERS - PART 1: SPECIFICATIONS (IEC 61672-1:2013)
    VDI 2083 Blatt 2:2015-04 Cleanroom technology - Stipulations regarding the checking and monitoring of continued compliance with specifications
    DIN EN ISO 14644-3:2006-03 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
    ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    EN 1822-5:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 5: Determining the efficiency of filter elements
    VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
    ISO 14644-5:2004 Cleanrooms and associated controlled environments Part 5: Operations
    DIN EN ISO 14644-2:2016-05 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 2: MONITORING TO PROVIDE EVIDENCE OF CLEANROOM PERFORMANCE RELATED TO AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-2:2015)
    EN 12599:2012 Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems
    ISO 7726:1998 Ergonomics of the thermal environment Instruments for measuring physical quantities
    VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
    VDI 3489 Blatt 2:1995-12 Particulate matter measurement - Methods for characterizing and monitoring test aerosols - Continuous flow condensation nucleus counter
    DIN EN ISO 14644-4:2003-06 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001)
    DIN EN 12599:2013-01 VENTILATION FOR BUILDINGS - TEST PROCEDURES AND MEASUREMENT METHODS TO HAND OVER AIR CONDITIONING AND VENTILATION SYSTEMS
    VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms
    VDI 3489 Blatt 8:1996-12 Particulate matter measurement - Methods for characterizing and monitoring test aerosols - Time-of-flight spectrometer
    EN 1822-2:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics
    VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
    DIN EN ISO 14644-5:2005-03 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
    ISO 14698-1:2003 Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
    EN ISO 7726:2001 Ergonomics of the thermal environment - Instruments for measuring physical quantities (ISO 7726:1998)
    DIN V ENV 1631:1997-03 CLEANROOM TECHNOLOGY - DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES
    PREN ISO 14644-8 : DRAFT 2011 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
    DIN EN 1822-1:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 1: CLASSIFICATION, PERFORMANCE TESTING, MARKING
    EN 61672-1:2013 Electroacoustics - Sound level meters - Part 1: Specifications
    DIN EN 1822-2:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 2: AEROSOL PRODUCTION, MEASURING EQUIPMENT, PARTICLE COUNTING STATISTICS
    EN ISO 9001:2015 Quality management systems - Requirements (ISO 9001:2015)
    ENV 1631 : 1996 CLEANROOM TECHNOLOGY - DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAR AIR DEVICES
    DIN EN 1822-3:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 3: TESTING FLAT SHEET FILTER MEDIA
    VDI 2083 Blatt 5:1996-02 Cleanroom technology - Thermal comfort
    DIN EN 12469:2000-09 BIOTECHNOLOGY - PERFORMANCE CRITERIA FOR MICROBIOLOGICAL SAFETY CABINETS
    VDI 3489 Blatt 3:1997-03 Particulate matter measurement - Methods of characterizing and monitoring test aerosols - Optical particle counter
    EN ISO 14644-5 : 2004 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 5: OPERATIONS
    ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
    ISO 9001:2015 Quality management systems — Requirements
    ISO 7730:2005 Ergonomics of the thermal environment — Analytical determination and interpretation of thermal comfort using calculation of the PMV and PPD indices and local thermal comfort criteria
    EN 1822-3:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 3: Testing flat sheet filter media
    DIN EN ISO 9001:2015-11 QUALITY MANAGEMENT SYSTEMS - REQUIREMENTS (ISO 9001:2015)
    ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
    EN 1822-1:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 1: Classification, performance testing, marking
    VDI 2083 Blatt 8:2002-09 Cleanroom technology - Cleanroom suitability of operating materials
    VDI 2083 Blatt 6:1996-11 Cleanroom technology - Personnel at the clean work place
    EN ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)
    EN 12469:2000 Biotechnology - Performance criteria for microbiological safety cabinets
    DIN EN 1822-5:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 5: DETERMINING THE EFFICIENCY OF FILTER ELEMENTS
    VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
    DIN 5035-6:2006-11 Artificial lighting - Part 6: Measurement and evaluation
    EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
    EN 1822-4:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method)
    EN ISO 14644-3:2005 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
    VDI 3489 Blatt 1:1990-01 Particulate matter measurement; methods for characterizing and monitoring test aerosols (survey)
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